Flow regulators and controller for liquids

Flow regulators and controller for liquids

for high purity and corrosive liquids, application: semi-conductor industry

Regulating with Flow controller for liquids


for non-corrosive liquids, accuracy: ± 2% FS, input and output signal: 0-5 VDC, ranges from 20-100 ml/min to 200-2000 ml/min, control module with LCD-display


The TM-MCM-U802 series flow meter measures and regulates the flow rates of virtually all liquids up to 15 ml / min or up to 10 l / min. Good results are achieved through the use of a patented microturbine flow sensor. Unlike traditional bucket wheel designs, this design provides accurate flow measurement without particle generation. An integrated proportional control valve is used to control the flow. PTFE, perfluoroelastomers, and sapphire as wetted parts ensure compatibility with chemicals commonly used in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresists.


The TM-MCM-6010 is a configurable flow controller. Its modular design allows the adaptation of a single device to different flow conditions and applications.

Although the controller is modular and can be built in many configurations, there are some common configurations offered as "factory" configurations. Flow controllers use an integrated flow rate sensor and a control valve to control the flow rate independently of input pressure fluctuations. A setpoint is a) provided by a user via the touch screen or b) remotely via an electronic signal. The controller then adjusts the integrated valve as needed to maintain the desired flow rate.

USB and RS485 interfaces are standard. Analog (mA or VDC) and relay outputs available as options. Wetted parts are made of PTFE, sapphire and Viton® (Kalrez® optional) and ensure compatibility.

The built-in 3.2-inch color touchscreen allows users to view flow rate, total flow, alarm conditions and more. Most configuration settings can be changed via the screen, including engineering units, setpoints, and calibration curves. Settings can be accessed via USB if the touch screen is not accessible.